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Information × Registration Number 0221U105851, 0121U111100 , R & D reports Title The modification of the surface of a solid body under the action of plasma and beams of charged particles. popup.stage_title Head Berseniev Viacheslav M., д.т.н. Registration Date 06-09-2021 Organization V.N. Karazin Kharkiv National University popup.description2 Research object: nonequilibrium low-temperature plasma in a DC electric field. Purpose of work: to expand the fundamental knowledge about the formation conditions and properties of the discharges in DC and RF electric fields. Research methods: complex experimental and theoretical studies of gas-discharge plasma. Results and novelty: The dependences of the conversion rate and conversion energy efficiency on the power inputted into the DC discharge, CO2 gas flows, specific energy input in a wide range of pressure values in the discharge chamber. The spatial evolution of the conversion process has been studied using spectral-spatial analysis. It has been determined the conversion rate and energy efficiency for DC discharge (85% and 1–10%, respectively) and for low-pressure RF capacitive discharge in a chamber with distributed overflow and gas pumping (70% and 1–2%, respectively). The values of the electron drift velocity in carbon-containing gases for different frequencies of the RF electric field and the distance between the electrodes have been obtained. A coating of a polymer film deposited in RF capacitive discharge plasma in acetylene has been obtained. Nanoparticles and conglomerates of them with a diameter of 300–500 nm have been observed on the polymer film. The polymer film, which was deposited on vertically arranged electrodes, contained nanoparticles with a diameter of about 10 nm. It has been shown that inclusions with a diameter of about 10 nm in the polymer film samples arose in the film formation process and not in the plasma volume. Keywords: GAS DISCHARGE, PLASMA, GAS BREAKDOWN, DISCHARGE IGNITION, CARBON GAS CONVERSION, NANOPARTICLES Product Description popup.authors Azarienkov Mykola Oleksiiovych Babenko Ievgeniia V Horokh Denys V Hrechko Yaroslav O. Lisovskyi Valerii Oleksandrovych Lesnik Igor Stanislavovich Mazilin Bogdan O Osmaev Ruslan Olegovich popup.nrat_date 2021-09-06 Close