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Information × Registration Number 0221U107010, 0120U102286 , R & D reports Title Creation of equipment and processes for synthesis of functional nanostructured carbon coatings from filtered vacuum-arc plasma for large-size and complex shapes wares popup.stage_title Head Strelnitskiy Volodimir Ye., Доктор фізико-математичних наук Registration Date 26-12-2021 Organization National Science Center "Kharkiv Institute of Physics and Technology" popup.description2  R&D report: 61 pp, 3 tables, 32 figs, 40 sources. DIAMOND-LIKE COATINGS, NANOSTRUCTURE, VACUUM ARC DEPOSITION, FILTERED PLASMA, ION BOMBARDING. Object of research: process of vacuum-arc deposition, structure and properties of nanostructured carbon coatings. Purpose: development of equipment and processes of vacuum-arc synthesis of protective antifriction carbon coatings of high quality on parts of complex shape and large size up to 300 mm in diameter. Research methods: optical interferometry, Raman and photoluminescent spectroscopy, nanoindentation, Rockwell adhesion test, mathematical modeling. The modes of vacuum-arc deposition by the FVAD PIII&D method of carbon coatings up to 5 μm thick, including those doped with nitrogen in a gas mixture with argon, have been developed. It is determined that with increasing amplitude of the pulse bias potential on the substrate from 0 to 2 kV the deposition rate increases from 2 to 5 μm/h, the hardness of the coatings decreases from 68 to 15 GPa. Increasing the partial pressure of nitrogen from 0 to 6•10-2 Pa leads to similar changes. In both cases, the reason is a decrease in the volume fraction of sp3 bound carbon and graphitization of the coating, with a decrease in its hardness and adhesion. The pulsed method and nitrogen doping allow to control the content of sp3/sp2 bonds of carbon atoms and mechanical properties of coatings, avoid overheating of the deposition surface and reduce the effects of sputtering. At argon pressure (0-2)•10-2 Pa the level of coating stresses is the lowest, which improves adhesion. The most promising are diamond-like coatings deposited at a pulse amplitude of (0.25-1) kV in the nitrogen pressure range (2-4)•10-2 Pa, with a sp3 structure of an amorphous matrix with inclusions of graphite nanocrystallites (1-2) nm in size. They are less prone to cracking and flaking off under load and are considered as an integral part of multilayer coatings to protect products that operate in extreme conditions Product Description popup.authors Vasyliev Volodymyr Vasyliovich Kalinichenko Oleksandr Ivanovich Luchaninov Oleksandr Andrijovich Reshetniak Olena Mykolajivna popup.nrat_date 2022-03-09 Close
R & D report
Head: Strelnitskiy Volodimir Ye.. Creation of equipment and processes for synthesis of functional nanostructured carbon coatings from filtered vacuum-arc plasma for large-size and complex shapes wares. (popup.stage: ). National Science Center "Kharkiv Institute of Physics and Technology". № 0221U107010
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Updated: 2026-03-24