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Registration Number

0222U003203, 0121U109316 , R & D reports

Title

Investigation of high-frequency generation and heating of plasma, combined discharges and discharges of direct current for treatment of walls of vacuum chambers and advanced methods of diagnostics of plasma and condition of vacuum surfaces.

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Head

Moiseenko Vladimir Ev., Кандидат фізико-математичних наук

Registration Date

21-02-2022

Organization

National Science Center "Kharkiv Institute of Physics and Technology"

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The possibility of operation of a two-coil antenna in the mode of cleaning the inner surfaces of the vacuum chamber in a small magnetic field without prior preionization, in a hydrogen plasma discharge has been tested. The twin-coil antenna can generate plasma and maintain a plasma density of up to 7 × 1011 cm-3 throughout the pulse. Comparison of measurements before and after treatment of the wall in a small magnetic field showed an increase in plasma parameters (density and temperature) in working (in strong magnetic fields) RF discharges after wall treatment and a decrease in partial pressure of residual gases (mass spectrometric measurements). The method of measuring the thermal desorption of stainless steel working gases has been improved. To estimate the percentage of working gas in the total volume of gases desorbed by heating the probes, it is proposed, along with simultaneous measurement of partial pressure of working gas and total gas emissions on one probe, to alternate measurement of partial pressure of basic residual gases (H2O, CO, CO, CO other probes subjected to the same plasma treatment as the first probe. The percentage of working gas in the mixture of desorbed gases was defined as the ratio of the measured partial pressure of the working gas to the sum of the partial pressure of the main residual gases. The dependences of the recharging atom (C) fluxes in three types of U-2M discharges through the neutral particle analyzer (NPA) have been studied. The CX flux corresponds to the perpendicular energy of the plasma ions. Neutral CX fluxes were measured in plasma discharges supported by a B-7ex double-coil antenna. The generalization of both author 's and literature data devoted to the application of microwave refraction in inhomogeneous plasma for its diagnosis is performed. The main methods of microwave diagnostics of inhomogeneous plasma using microwave refraction are presented. Ways to expand the scope of microwave refraction for plasma diagnosti 

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BARON Demian I.
GLAZUNOV Gennady P.
DREVALʹ Mykola B
Kovtun Yurii Viktorovych
KRASYUK Oleksandr Yu.
KULIK Yulia Se
LYSTOPAD Viktor M.
LOZIN Oleksiy V.
MAZNICHENKO Sergey M

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2022-03-09