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Information × Registration Number 0302U003240, 0101U001839 , R & D reports Title Current transport processes in elements of control and communication systems based on А3В5 thin-film structures popup.stage_title Аналітичний огляд та патентні дослідження існуючих методів діагностики глибоких центрів в структурах сполучень А3В5 Head Pryvalov Ye.M., Registration Date 01-04-2002 Organization Institute of Technical Mechanics of the National Academy of Sciences and National Space Agency of Ukraine popup.description2 The study is concerned with thin-film GaAs structures. The investigation method is information-analytical, numerical and experimental. It is shown that it is appropriate to develop rapid methods of deep level diagnostics in GaAs thin-film structures based on the C-V technique with allowance for the merging of space charge regions and that the sidegating mechanism can be identified by varying the spacing between the sidegate electrode on the substrate and the film. The field of application is semiconductor device fabrication. Product Description popup.authors popup.nrat_date 2020-04-02 Close