Search academic texts

Information × Registration Number 0304U007007, 0104U010655 , R & D reports Title Development and production of device for semiconductor materials polishing popup.stage_title Розробка та виготовлення пристрою для прецизійного полірування напівпровідникових матеріалів Head Lysenko G.M., Кандидат біологічних наук Registration Date 23-12-2004 Organization Special Techologial Department popup.description2 Operable sample of device for semiconductor materialsprecision polishing was made. Diameter of polishing surfase was 200 mm, velociti of rotation was from 20 up to 100 rpm, maximum load during polishing process was to 50 grams5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close