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Information × Registration Number 0305U003275, 0103U004200 , R & D reports Title Particle fluxes and radiation and their interaction with the substance complex studies for the new technologies elaboration popup.stage_title Дослідження фізичних основ взаємодії потоків частинок і випромінювання з речовиною в різних агрегатних станах Head Tolok V.; Muratov V., Registration Date 04-03-2005 Organization Kharkov national university named after V.N. Karazin popup.description2 Subject of investigation - plasma-beam systems. Purpose of the work is carrying out complex investigation of interaction of charged particles and waves with matter and development of high technologies based on the results of the investigation. The novel technology allows one to deposite high-quality thin (0.5 - 5 µm) onto various products, including ones with low melting temperature. The mechanism of formation of ion beams with the energy less than 100 eV and current density up to 1.5 mA/cm2 at low pressure (10-4 torr) of inert and chemically-active gases in the plasma source based on rf surface waves was studied. The current of negative hydrogen ions of 300 µA with the density of 0.7 mA/cm2 and energy efficiency of 300 W/mA was produced. The new method that can be utilized at studies of silicon for identification of oxide film on the silicon surface which formed in natural way was developed. By longitudinal profile of magnetic field strength we can determine distribution of longitudinal component of the energy. In order to calculate distribution of the longitudinal energy the program "Moment" was created. A wide spectrum containing up to 20 harmonics of modulation frequency was obtained. The investigations of temperature and concentration dependencies of dielectric parameters of distilled water and water electrolyte systems were carried out. Product Description popup.authors popup.nrat_date 2020-04-02 Close