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Information × Registration Number 0307U001168, 0106U000362 , R & D reports Title Investigation of the influence of atomic hydrogen on thin metal films and heterostructure with thin films popup.stage_title Вивчення процесів взаємодії атомарного водню (адсорбції, десорбції, зміни зарядового стану) з поверхнею тонких плівок Head Matyushin V.M., Registration Date 29-01-2007 Organization Zaporizhzhia National Technical University popup.description2 The object of research - laws of modification of electrophysical parameters of thin metal films and heterostructure on their basis. Object of research - thin metal film and heterostructure on their basis. Researches of physical processes and mechanisms of interaction of atomic hydrogen with thin metal films with different properties and heterostructure on their basis by measurement of electrophysical parameters of samples are executed. It is shown that the influence of atomic hydrogen results in change of work function (dWF) of experimental thin metallic films (Ni, Ag, Cu, Al). It is revealed, that this change (from 0,3 up to 0,8 еВ at concentration of hydrogen ~1E16-1E19 m-3) occurs mainly due to processes of physical adsorption for Ni, Ag, Al. For copper films have observed the chemical adsorption with formation of interconnection that is shown in an extremum of dependence of dWF from time of processing. Dependence of proceeding processes on temperature of samples and manufacturing techniques films is found experimentally out. Modes of processing of samples пленок for carrying out of purposeful changes and optimization of their parameters are chosen. Product Description popup.authors popup.nrat_date 2020-04-02 Close