1 documents found
Information × Registration Number 0307U007446, 0106U011309 , R & D reports Title Theoretical and experimental researches of HF ionization at the electron beam evaporation popup.stage_title Теоретико-експериментальні дослідження процесу ВЧ іонізації при електронно-променевому випарюванні Head Baturin Volodymyr Andrijovych, Кандидат фізико-математичних наук Registration Date 09-10-2007 Organization Applied Physics Institute NAS of Ukraine popup.description2 RF-plasma techniques were analysed. It is shown that the method of the ultra high-frequency interferometry is the most suitable for the investigation of the RF-plasma parameters. Specific scheme of the interferometer was presented and the experimental device for the analysis of the metal vapour plasma characteristics was designed Product Description popup.authors popup.nrat_date 2020-04-02 Close
R & D report
Theoretical and experimental researches of HF ionization at the electron beam evaporation
Head: Baturin Volodymyr Andrijovych. Theoretical and experimental researches of HF ionization at the electron beam evaporation. (popup.stage: Теоретико-експериментальні дослідження процесу ВЧ іонізації при електронно-променевому випарюванні). Applied Physics Institute NAS of Ukraine. № 0307U007446
1 documents found

Updated: 2026-03-25


Роздрукувати цю сторінку