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Information × Registration Number 0309U000114, 0107U000441 , R & D reports Title Simulation of mass transport processes during thin films deposition by energy particles popup.stage_title Розрахунки зовнішніх параметрів аналітичної моделі масоперенесення при напилюванні тонких плівок шляхом молекулярно-динамічного моделювання Head Kornich Grigoriy, Доктор фізико-математичних наук Registration Date 28-01-2009 Organization Zaporizhzhia National Technical University popup.description2 Goal and subject of the work are obtaining numeric values of sputtering coefficients and sticking coefficients, atom jump statistics in the nearby surface region for thin film-substrate systems using algorithms and programs developed for molecular dynamics simulation of deposition of thin films by monatomic particle beams. Object of research is deposition of thin films by energy atomic particles. Corresponded coefficients for thin film deposition model are obtained. Depth concentration profiles with model parameters obtained by molecular dynamics simulation are calculated. Product Description popup.authors popup.nrat_date 2020-04-02 Close