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Information × Registration Number 2106U000431, Article popup.category Стаття Title popup.author popup.publication 01-01-2006 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/4077 popup.publisher Technical Physics Letters Description A substantially new technological approach is considered, which is based on the self-organized formation of aluminum single crystal layer on isotropic substrates in the course of stationary condensation of reverse diffusion fluxes in a planar dc magnetron. The functional possibilities of self-organized ion sputtering systems are discussed. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/4077 popup.nrat_date 2025-05-12 Close