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Information × Registration Number 2108U000653, Article popup.category Стаття Title popup.author popup.publication 01-01-2008 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/4100 popup.publisher Physics of the Solid State Description A fundamentally new technological approach to creating porous metal structures on isotropic substrates during condensation of a reverse diffusion flow in a planar dc magnetron is proposed. The physical foundations of the operation of self-organized sputtering systems are analyzed. Conditions of the formation of main varieties of porous structures, such as weakly coupled micro- and nanocrystals, and three-dimensional labyrinth structures, are found using scanning electron microscopy. It is established that the main prerequisites for the formation of pores are the stationarity of the process and proximity to the phase equilibrium in the plasma–condensate system. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/4100 popup.nrat_date 2025-05-12 Close