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Information × Registration Number 2111U000285, Article popup.category Стаття Title popup.author popup.publication 01-01-2011 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/22118 popup.publisher Видавництво СумДУ Description Molybdenum (Mo) thin films are most widely used as an ohmic back-contact in the copper indium diselenide (CIS) and its alloy copper indium gallium diselenide (CIGS) based thin film solar cell. Radio frequency (RF) magnetron sputtering system used to deposit Mo thin films on soda lime glass substrate. The deposition was carried out using argon (Ar) gas at different Ar controlled (working) pressures (1 mTorr to 10 mTorr) and at different RF powers (60 W to 100 W). The influence of both the working pressure and the RF power on the Mo thin films was studied by investigating its structural, morphological, electrical, and optical measurements. The results reveal that a stress-free, low-sheet-resistance (~1 W/􀀀), and reflecting (~ 55 %) Mo thin film was observed at 1 mTorr working pressure and 100 W RF power. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/22118 popup.nrat_date 2025-03-24 Close