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Information × Registration Number 2111U001215, Article popup.category Thesis Title popup.author popup.publication 01-01-2011 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/20646 popup.publisher Видавництво СумДУ Description By means of in situ measurement of the temperature of condensation surface by two independent methods during deposition of various materials by magnetron sputtering it was revealed that it is noticeably higher than that of the substrate and linearly increases with increasing of the deposition rate of the film. This effect is explained by the idea that intermediate liquid-like layer forms on the boundary between the vapor and solid (film) phases, that exists exceptionally during arrival of sputtered species on the condensation surface. Calculations based on the experimental results show that thermal conductivity of the layer is 8-10 orders of magnitude lower than that for bulk materials. The existence of a layer with such thermal properties provides observing temperature difference between condensation surface and substrate. The suggested simple quantitative film growth model is in a good agreement with experimental results and is invariant relative the film deposition technique. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/20646 popup.nrat_date 2025-05-12 Close