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Information × Registration Number 2112U000402, Article popup.category Стаття Title popup.author popup.publication 01-01-2012 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/24922 popup.publisher Видавництво СумДУ Description The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-730 cm 1 or in the region of 830 850 cm 1 depending on the deposition parameters whereas it is not exceed 630 cm 1 from TiAlN of NaCl structure. It is found the two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4 are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/24922 popup.nrat_date 2025-03-24 Close