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Information × Registration Number 2112U000849, Article popup.category Стаття Title popup.author popup.publication 01-01-2012 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/24908 popup.publisher Видавництво СумДУ Description The paper presents the results of theoretical basis of possibility of nanostructured thin-film formation by mechanical stress creation in ultra-thin films deposited on a substrate during their thermal annealing. The experiment results of palladium (Pd) ultra-thin films obtained on silicon (Si) substrates and their vacuum annealing are also presented. The samples were studied by AES and SEM methods. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/24908 popup.nrat_date 2025-03-24 Close