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Information × Registration Number 2113U000856, Article popup.category Стаття Title popup.author popup.publication 01-01-2013 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/35555 popup.publisher Sumy State University Description The paper presents the results of investigations of ion sources developed in the IAP of NAS of Ukraine for generation of high brightness ion beams with small energy spread. A series of RF ion sources operated at the frequency of 27.12 MHz were studied: the inductive RF ion source, the helicon ion source, the multi-cusp RF ion source, and the sputter type RF source of metal ions. A global model and transformer model were applied for calculation of RF source plasma parameters. Ion energy spread, ion mass, and ion current density of some sources were measured in the wide range of RF power, extraction voltage and gas pres-sure. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35555 popup.nrat_date 2025-03-24 Close