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Information × Registration Number 2113U000954, Article popup.category Стаття Title popup.author popup.publication 01-01-2013 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/33672 popup.publisher Сумський державний університет Description The procedure for the determination of elastic parameters according to reference nanometer lithographic marks by atomic force microscopy on samples with up to microscopic sizes is proposed. Analysis of dynamic changes of elastic characteristics that makes it possible to establish the critical rotation velocity of a CD without plastic deformations has been made. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/33672 popup.nrat_date 2025-03-24 Close