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Information × Registration Number 2114U001911, Article popup.category Стаття Title popup.author popup.publication 01-01-2014 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/37119 popup.publisher Sumy State University Description Modification of diamond-like carbon (DLC) films by laser radiation with a wavelength of 532 nm and pulse duration of 18 ns was investigated. The treatment of DLC films with laser fluence over 0.4 J/cm2 was accompanied by the formation of conductive structures with a surface resistance from a few to hundreds kΩ/sq. Dependence of films conductivity from the laser fluence was established. Relationship between energy density of laser radiation and the structural changes in the films, its heating and evaporation is discussed. popup.nrat_date 2025-05-12 Close