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Information × Registration Number 2115U001852, Article popup.category Стаття Title popup.author popup.publication 01-01-2015 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/46287 popup.publisher Society of Polish Electrical and Electronics Engineers Description Nanostructured multilayered TiN/ZrN coatings were fabricated using vacuum-arc deposition method. Amount of layers was 134-533; average bilayer thickness was 20-125 nm depending on deposition conditions. Good planarity of nanoscale bilayers were observed. Regularities of phase-structure changes in surface layers under the influence of aggressive oxygen atmosphere and high temperature (700С) annealing were established as a model of critical working conditions. Bilayer thickness influence on hardness was explored. Maximum hardness was 42 GPa. popup.nrat_date 2025-05-12 Close