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Information × Registration Number 2115U002029, Article popup.category Стаття Title popup.author popup.publication 01-01-2015 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/46103 popup.publisher Pleiades Publishing, Ltd. Description Results of studies of the morphology, elemental and phase compositions of coatings prepared by pulsed magnetron sputtering of the AlN–TiB2–TiSi2 composite ceramic target have been reported. The used technology allows us to prepare a protective amorphouslike layer with ordering areas with sizes up to 1 nm. The heat treatment of samples at 900 and 1300°C leads to the depletion of the coating surface of boride phases and the formation of αAl2O3 and β]TiO2based protective films on the surface. The growth of crystallites of the nanostructured coating to 11–25 nm is observed. The annealing at 1300°C allows us to obtain the ther mally stable crystalline state of substance, the nanohardness of which is 11 GPa. popup.nrat_date 2025-05-12 Close