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Information × Registration Number 2118U003243, Article popup.category Стаття Title popup.author popup.publication 01-01-2018 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/70778 popup.publisher Elsevier Description The (TiZrNbHfTa)N/WN multicomponent coatings were deposited by vacuum arc evaporation under dif- ferent substrate bias (-90 and -280 V).X-ray photoelectron spectroscopy was used for analyzing of com- plex composition of investigated coatings by reflecting of atomic scale chemical interactions. The structural investigations showed the formation of a simple disordered solid solution in (TiZrNbHfTa)N layer, b-W2N phase in WN layer with fcc crystal structure and highly disordered bcc (110) and (220) -oriented high-entropy alloy phases, regardless of the applied bias potential. It was shown that with increasing of substrate bias from -90 to -280 V, there is a slight decrease of hardness from 34 to 31 GPa and increase of Young’s modulus from 325 to 337 GPa, which can be explained by annihilation of point defects and precipitation of relatively softer metallic phase. popup.nrat_date 2025-05-12 Close