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Information × Registration Number 0101U004340, ( 0203U008834  ) R & D request Title Moduli setup for plasma-photostimulated deposition of films of superhard materials Head Литовченко В.Г., Registration Date 04-07-2001 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-11 Close