1 documents found
Information × Registration Number 0102U005322, R & D request Title Research and development of the complex of reactor modules for basic technologies of vacuum-plasma etching for production of modern microelectronic devices and integrated circuits Head Фареник В.І., Registration Date 05-08-2002 Organization V.N. Karazin Kharkiv National University popup.description1 popup.nrat_date 2024-12-11 Close
search.res_rk
Research and development of the complex of reactor modules for basic technologies of vacuum-plasma etching for production of modern microelectronic devices and integrated circuits
Head: Фареник В.І.. Research and development of the complex of reactor modules for basic technologies of vacuum-plasma etching for production of modern microelectronic devices and integrated circuits. V.N. Karazin Kharkiv National University. № 0102U005322
1 documents found

Updated: 2026-03-22


Роздрукувати цю сторінку