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Information × Registration Number 0103U003082, ( 0205U004164  ) R & D request Title Investigation of the processes of low temperature formation, modification and properties of nanocrystalline films on the basis of silicon carbide Head Семенов О.В., Registration Date 14-10-2004 Organization Institute for single crystals NASU popup.description1 popup.nrat_date 2024-12-11 Close
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Head: Семенов О.В.. Investigation of the processes of low temperature formation, modification and properties of nanocrystalline films on the basis of silicon carbide. Institute for single crystals NASU. № 0103U003082
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Updated: 2026-03-28