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Information × Registration Number 0104U003029, ( 0206U000202  ) R & D request Title Scientific basis of increasing the measurement accuracy of parameters of the electron-beam superpure semiconductor silicon production technologies Head Порєв Володимир Андрійович, Registration Date 01-03-2004 Organization National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” popup.description1 popup.nrat_date 2024-12-11 Close
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Scientific basis of increasing the measurement accuracy of parameters of the electron-beam superpure semiconductor silicon production technologies
Head: Порєв Володимир Андрійович. Scientific basis of increasing the measurement accuracy of parameters of the electron-beam superpure semiconductor silicon production technologies. National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”. № 0104U003029
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Updated: 2026-03-25


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