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Information × Registration Number 0104U008096, R & D request Title Optimizationof technological parameters of grouth monocrystals 6H-SiC with the given structural characteristics Head Кисельов В.С., Registration Date 06-08-2004 Organization State Enterprise "Special design and technological bureau with experimental production of V.Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine" popup.description1 popup.nrat_date 2024-12-11 Close