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Information × Registration Number 0104U009357, R & D request Title Refinement of the conditions for deposition of Al2О3 dielectric coatings using magnetron techniques and finishing the ion-plasmf system elements to perform ionization of the electron-beam source vapours Head Батурін Володимир Андрійович, Registration Date 07-01-2004 Organization Institute of Applied Physics, NAS of Ukraine popup.description1 popup.nrat_date 2024-12-11 Close
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Refinement of the conditions for deposition of Al2О3 dielectric coatings using magnetron techniques and finishing the ion-plasmf system elements to perform ionization of the electron-beam source vapours
Head: Батурін Володимир Андрійович. Refinement of the conditions for deposition of Al2О3 dielectric coatings using magnetron techniques and finishing the ion-plasmf system elements to perform ionization of the electron-beam source vapours. Institute of Applied Physics, NAS of Ukraine. № 0104U009357
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Updated: 2026-03-22


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