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Information × Registration Number 0104U009470, ( 0207U002889  ) R & D request Title Investigation and Elaboration of inorganic photolithography methods for obtaining relief microstructures on metallic and dielectric substrates of optical information carriers. Head Рубіш В.М., Registration Date 12-11-2004 Organization Uzhgorod department of optoinformatic elements and structures Institute for Information Recording NASU popup.description1 popup.nrat_date 2024-12-11 Close
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Head: Рубіш В.М.. Investigation and Elaboration of inorganic photolithography methods for obtaining relief microstructures on metallic and dielectric substrates of optical information carriers.. Uzhgorod department of optoinformatic elements and structures Institute for Information Recording NASU. № 0104U009470
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Updated: 2026-03-23