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Information × Registration Number 0104U010879, R & D request Title Theoretical and experimental researches by the method of scanning probe microscopy of the atomic structure of thin oxides layers which are the elements of the applied structures. Development and optimization of methods of implantation of the Si+ low-energetic ions in the structure of the SіO2 nanothin thermal oxides on monocrystal silicon substrate. Head Бердар Микола Миколайович, Registration Date 23-12-2004 Organization popup.description1 popup.nrat_date 2024-12-11 Close
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Theoretical and experimental researches by the method of scanning probe microscopy of the atomic structure of thin oxides layers which are the elements of the applied structures. Development and optimization of methods of implantation of the Si+ low-energetic ions in the structure of the SіO2 nanothin thermal oxides on monocrystal silicon substrate.
Head: Бердар Микола Миколайович. Theoretical and experimental researches by the method of scanning probe microscopy of the atomic structure of thin oxides layers which are the elements of the applied structures. Development and optimization of methods of implantation of the Si+ low-energetic ions in the structure of the SіO2 nanothin thermal oxides on monocrystal silicon substrate.. . № 0104U010879
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Updated: 2026-03-22


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