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Information × Registration Number 0105U001375, ( 0209U001973  ) R & D request Title Research of the protective masks stability from nickel in conditions plasmochemical etchings of semiconductor materials in plasma of the HF-discharge with controlled magnetic fields. Head Борисенко Анатолій Григорович, Registration Date 04-03-2005 Organization Institute for Nuclear Research of NAS of Ukraine popup.description1 popup.nrat_date 2024-12-11 Close
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Research of the protective masks stability from nickel in conditions plasmochemical etchings of semiconductor materials in plasma of the HF-discharge with controlled magnetic fields.
Head: Борисенко Анатолій Григорович. Research of the protective masks stability from nickel in conditions plasmochemical etchings of semiconductor materials in plasma of the HF-discharge with controlled magnetic fields.. Institute for Nuclear Research of NAS of Ukraine. № 0105U001375
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Updated: 2026-03-27


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