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Information × Registration Number 0105U003752, ( 0207U000840  ) R & D request Title Investigation of the processes of low-temperature formation of SiC films with nanodimensional elements based on composition disordering under the conditions of cooling lov-energy ions Head Пузіков Вячеслав Михайлович, Registration Date 08-06-2005 Organization Institute for single crystals NASU popup.description1 popup.nrat_date 2024-12-11 Close
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Investigation of the processes of low-temperature formation of SiC films with nanodimensional elements based on composition disordering under the conditions of cooling lov-energy ions
Head: Пузіков Вячеслав Михайлович. Investigation of the processes of low-temperature formation of SiC films with nanodimensional elements based on composition disordering under the conditions of cooling lov-energy ions. Institute for single crystals NASU. № 0105U003752
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Updated: 2026-03-21


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