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Information × Registration Number 0106U000095, ( 0207U005103  ) R & D request Title Development of technology reception monolithic MEMS structures on the basis of a piezoelectric films nitride of aluminium for radio-electronic devices and communication systems Head Якименко Юрій Іванович, Registration Date 16-01-2006 Organization National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” popup.description1 popup.nrat_date 2024-12-11 Close
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Development of technology reception monolithic MEMS structures on the basis of a piezoelectric films nitride of aluminium for radio-electronic devices and communication systems
Head: Якименко Юрій Іванович. Development of technology reception monolithic MEMS structures on the basis of a piezoelectric films nitride of aluminium for radio-electronic devices and communication systems. National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”. № 0106U000095
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Updated: 2026-03-24


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