1 documents found
Information × Registration Number 0106U004069, ( 0209U008492  ) R & D request Title Mathematical model and microelectronic production engineering of combined structures MEMS on the basis of piezoelectric diaphragmas Head Жуйков Валерій Якович, Registration Date 24-03-2006 Organization National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” popup.description1 popup.nrat_date 2024-12-11 Close
search.res_rk
Mathematical model and microelectronic production engineering of combined structures MEMS on the basis of piezoelectric diaphragmas
Head: Жуйков Валерій Якович. Mathematical model and microelectronic production engineering of combined structures MEMS on the basis of piezoelectric diaphragmas. National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”. № 0106U004069
1 documents found

Updated: 2026-03-23


Роздрукувати цю сторінку