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Information × Registration Number 0107U000751, R & D request Title Development of microsystem technology and production of microelectronic test structures and microprofiled of silicon for sensitive elements electromechanical transducers Head Шаран Микола Миколаєвич, Registration Date 08-02-2007 Organization Research Center of Radio Electronics "Polyus" popup.description1 popup.nrat_date 2024-12-10 Close
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Development of microsystem technology and production of microelectronic test structures and microprofiled of silicon for sensitive elements electromechanical transducers
Head: Шаран Микола Миколаєвич. Development of microsystem technology and production of microelectronic test structures and microprofiled of silicon for sensitive elements electromechanical transducers. Research Center of Radio Electronics "Polyus". № 0107U000751
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Updated: 2026-03-22


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