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Information × Registration Number 0107U002712, ( 0210U003499  ) R & D request Title Design processing technique of reception functional touch MEMS on the basis of nanostructural piezoelectric films of nitride aluminium and silicon interconnections Head Якименко Юрій Іванович, Registration Date 22-03-2007 Organization National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” popup.description1 popup.nrat_date 2024-12-10 Close
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Design processing technique of reception functional touch MEMS on the basis of nanostructural piezoelectric films of nitride aluminium and silicon interconnections
Head: Якименко Юрій Іванович. Design processing technique of reception functional touch MEMS on the basis of nanostructural piezoelectric films of nitride aluminium and silicon interconnections. National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”. № 0107U002712
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Updated: 2026-03-26


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