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Information × Registration Number 0107U005749, ( 0208U000316  ) R & D request Title Development of technology of fabrication of SiC thin films and creation of micro-electromechanichal structures and light-emitting devices on their basis Head Лисенко Володимир Сергійович, Registration Date 04-07-2007 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Development of technology of fabrication of SiC thin films and creation of micro-electromechanichal structures and light-emitting devices on their basis
Head: Лисенко Володимир Сергійович. Development of technology of fabrication of SiC thin films and creation of micro-electromechanichal structures and light-emitting devices on their basis. V. Lashkaryov Institute of semiconductor physics. № 0107U005749
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Updated: 2026-03-23


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