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Information × Registration Number 0107U005753, ( 0208U000849  ) R & D request Title Development of microsystem technology of sensor and micromechanichal systems based on silicon Head Козловський Сергій Іванович, Registration Date 04-07-2007 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close