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Information × Registration Number 0107U005772, ( 0208U002027  ) R & D request Title Creation of diagnostic complex for control and attestation of semiconductor materials and structures by X-ray diffraction and AFM methods Head Мачулін Володимир Федорович; Прокопенко Ігор Васильович, Registration Date 04-07-2007 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Creation of diagnostic complex for control and attestation of semiconductor materials and structures by X-ray diffraction and AFM methods
Head: Мачулін Володимир Федорович; Прокопенко Ігор Васильович. Creation of diagnostic complex for control and attestation of semiconductor materials and structures by X-ray diffraction and AFM methods. V. Lashkaryov Institute of semiconductor physics. № 0107U005772
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Updated: 2026-03-20


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