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Information × Registration Number 0107U005782, ( 0208U002200  ) R & D request Title Development of methods and equipment for optical diagnostics of nanoscale Si Head Литовченко Володимир Григорович; Лісовський Ігор Петрович, Registration Date 04-07-2007 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Development of methods and equipment for optical diagnostics of nanoscale Si
Head: Литовченко Володимир Григорович; Лісовський Ігор Петрович. Development of methods and equipment for optical diagnostics of nanoscale Si. V. Lashkaryov Institute of semiconductor physics. № 0107U005782
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Updated: 2026-03-23


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