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Information × Registration Number 0107U005784, ( 0208U000763  ) R & D request Title Development of methods and apparatus for diagnostics of electronic engineering materials, laminated structures and microelectronic devices based on Auger electronic spectroscopy Head Романюк Борис Миколайович, Registration Date 04-07-2007 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Development of methods and apparatus for diagnostics of electronic engineering materials, laminated structures and microelectronic devices based on Auger electronic spectroscopy
Head: Романюк Борис Миколайович. Development of methods and apparatus for diagnostics of electronic engineering materials, laminated structures and microelectronic devices based on Auger electronic spectroscopy. V. Lashkaryov Institute of semiconductor physics. № 0107U005784
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Updated: 2026-03-23


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