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Information × Registration Number 0107U008219, ( 0208U005792  ) R & D request Title Development of high effective precision technology of clearing a surface of thin layers of semi-conductor , dielectric and metal materials Head Чуба Євген Маркіянович, Registration Date 01-10-2007 Organization Scientific and production corporation "Kyiv institute of automation" popup.description1 popup.nrat_date 2024-12-10 Close
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Head: Чуба Євген Маркіянович. Development of high effective precision technology of clearing a surface of thin layers of semi-conductor , dielectric and metal materials. Scientific and production corporation "Kyiv institute of automation". № 0107U008219
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Updated: 2026-03-23