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Information × Registration Number 0107U009943, R & D request Title Development of the vacuum system for the receipt nanostructures of silicon and germanium Head Фонкич Олександр Михайлович, Registration Date 08-11-2007 Organization State Enterprise "Special design and technological bureau with experimental production of V.Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine" popup.description1 popup.nrat_date 2024-12-10 Close
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Head: Фонкич Олександр Михайлович. Development of the vacuum system for the receipt nanostructures of silicon and germanium. State Enterprise "Special design and technological bureau with experimental production of V.Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine". № 0107U009943
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Updated: 2026-03-22