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Information × Registration Number 0107U010814, R & D request Title Development of versatile ion source for ion-radical etching of microelectronic materials based on combined inductive-capasitive RF discharge Head Дудін Станіслав Валентинович, Registration Date 20-11-2007 Organization V.N. Karazin Kharkiv National University popup.description1 popup.nrat_date 2024-12-10 Close
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Development of versatile ion source for ion-radical etching of microelectronic materials based on combined inductive-capasitive RF discharge
Head: Дудін Станіслав Валентинович. Development of versatile ion source for ion-radical etching of microelectronic materials based on combined inductive-capasitive RF discharge. V.N. Karazin Kharkiv National University. № 0107U010814
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Updated: 2026-03-22


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