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Information × Registration Number 0108U001310, ( 0209U002737  ) R & D request Title The investigation of the effect of anomalously high temperature of the growth surface appearing during film deposition by magnetron sputtering and vacuum arc evaporation Head Шагінян Леонід робертович, Registration Date 07-02-2008 Organization Institute for Problems in Materials Science popup.description1 popup.nrat_date 2024-12-10 Close
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The investigation of the effect of anomalously high temperature of the growth surface appearing during film deposition by magnetron sputtering and vacuum arc evaporation
Head: Шагінян Леонід робертович. The investigation of the effect of anomalously high temperature of the growth surface appearing during film deposition by magnetron sputtering and vacuum arc evaporation. Institute for Problems in Materials Science. № 0108U001310
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Updated: 2026-03-25


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