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Information × Registration Number 0108U001476, ( 0211U006020  ) R & D request Title The obtaining of different polytypes of silicon carbide films by direct deposition of low-energy ions Head Семенов Олександр Володимирович, Registration Date 20-02-2008 Organization Institute for single crystals NASU popup.description1 popup.nrat_date 2024-12-10 Close
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The obtaining of different polytypes of silicon carbide films by direct deposition of low-energy ions
Head: Семенов Олександр Володимирович. The obtaining of different polytypes of silicon carbide films by direct deposition of low-energy ions. Institute for single crystals NASU. № 0108U001476
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Updated: 2026-03-23


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