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Information × Registration Number 0108U003666, ( 0210U000318  ) R & D request Title Development of high-resolution chalcogenide photoresists and their application in photoelectronics Head Indutnyi Ivan , Доктор фізико-математичних наук Registration Date 04-06-2008 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close