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Information × Registration Number 0108U004834, ( 0214U008016  ) R & D request Title Design and development of the growth technology of low-temperature nanostructured Si compounds for microelectronic sensors Head Мітін Вадим Федорович, Registration Date 20-05-2008 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Design and development of the growth technology of low-temperature nanostructured Si compounds for microelectronic sensors
Head: Мітін Вадим Федорович. Design and development of the growth technology of low-temperature nanostructured Si compounds for microelectronic sensors. V. Lashkaryov Institute of semiconductor physics. № 0108U004834
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Updated: 2026-03-23


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