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Information × Registration Number 0108U004840, ( 0213U007249  ) R & D request Title Metrological setup development and producing for nanoelectronic components diagnostic basing on scanning probe microscopy techniques Head Прокопенко Ігор Васильович, Registration Date 25-06-2009 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Metrological setup development and producing for nanoelectronic components diagnostic basing on scanning probe microscopy techniques
Head: Прокопенко Ігор Васильович. Metrological setup development and producing for nanoelectronic components diagnostic basing on scanning probe microscopy techniques. V. Lashkaryov Institute of semiconductor physics. № 0108U004840
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Updated: 2026-03-25


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