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Information × Registration Number 0108U007257, R & D request Title Development and creation of pulse laser spectroscopy methods and equipment for control of atomic composition of nanoelectronics materials Head Федоренко Леонід Леонідович, Тетьоркін Володимир Володимирович, Registration Date 17-07-2008 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Head: Федоренко Леонід Леонідович, Тетьоркін Володимир Володимирович. Development and creation of pulse laser spectroscopy methods and equipment for control of atomic composition of nanoelectronics materials. V. Lashkaryov Institute of semiconductor physics. № 0108U007257
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Updated: 2026-03-22