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Information × Registration Number 0108U007460, ( 0209U010902  ) R & D request Title Development of technology introduction of ultrasonic fluctuations in the silicon plates for the formation of nanoscale hidden layers SiO2, Si3N4 and p-n junctions Head Мартинюк Яків Васильович, Registration Date 24-07-2008 Organization National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” popup.description1 popup.nrat_date 2024-12-10 Close
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Development of technology introduction of ultrasonic fluctuations in the silicon plates for the formation of nanoscale hidden layers SiO2, Si3N4 and p-n junctions
Head: Мартинюк Яків Васильович. Development of technology introduction of ultrasonic fluctuations in the silicon plates for the formation of nanoscale hidden layers SiO2, Si3N4 and p-n junctions. National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”. № 0108U007460
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Updated: 2026-03-27


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